Model Content & Index Item | ZS-1000 | ZS-1200 | ZS1350 |
Vacuum Chamber Dimension（mm） | 1000×1150Height | 1200×1350 Height | 1350×1450 Height |
Vacuum Unit | One set of 2X-70 Mechanical Pump, ZJP-300 Roots Pump, KT-600
Diffusion Pump and ZX-15 Mechanical Pump | One set of 2X-70 Mechanical Pump, ZJP-300 Roots Pump and
ZX-15Rotary-Vane Pump; Two sets of KT-600 Diffusion Pumps | One set of 2X-70 Mechanical Pump, ZJP-300 Roots Pump and ZX-15
Mechanical Pump; Two sets of KT-600 Diffusion Pumps |
Vacuum Performance | Ultimate Pressure: 6.7×10-4pa Pumping Speed: From Atmosphere to 5×10-3pa≤15minutes | Ultimate Pressure: 6.7×10-4pa Pumping Speed: From Atmosphere to 5×10-3pa≤15minutes | Ultimate Pressure: 6.7×10-4pa Pumping Speed: From Atmosphere to 5×10-3pa≤15minutes |
Clamps | One Spherical Surface Clamp in 950mm or Three Planet Clamps in
700mm | One Spherical Surface Clamp in 1150mm or Three Planet Clamps in
860mm | One Spherical Surface Clamp in 1300mm or Three Planet Clamps in
950mm |
Electron Beam Evaporation System | HT-DE180 | HT-DE220 | HT-DE250 |
Ion Source (Ion Bombardment) | HOLL Ion Source, 2KW | HOLL Ion Source, 2KW | HOLL Ion Source, 2KW |
Optical Film-Thickness Monitoring System | Light Source, Fiber Optical path, Grating Monochromator, Power Supply, Film-Thickness Monitor | Light Source, Fiber Optical path, Grating Monochromator, Power Supply, Film-Thickness Monitor | Light Source, Fiber Optical path, Grating Monochromator, Power Supply, Film-Thickness Monitor |
Option1、Quartz Crystal Film-Thickness Controller 2、Low Temperature
Condenser |
CustomizationDesign and configuration are tailored to clients’
demands. |
